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Proceedings Paper

GaAs-membrane-supported millimeter-wave filters
Author(s): George Konstantinidis; Alexandru Mueller; George Deligiorgis; Ioana Petrini; Dan Vasilache; Dan Neculoiu; Michalis Lagadas; Cristina Buiculescu; Viorel Avramescu; Sergiu A. Iordanescu; Pierre Blondy
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Paper Abstract

This paper presents the fabrication processes for micromachined millimeter wave devices on micromachined GaAs substrate. For the first time, a 2.2 micrometers thin GaAs/AlGaAs membrane, obtained by MBE growth and micromachining of semiinsulating <100> GaAs, is used as support for millimeter wave filter structures. Cascaded coplanar waveguide open-end series stubs filter type structures, with central frequency of 38 respectively 77 GHz were designed and manufactured on GaAs micromachined substrate. `On wafer' measurements for the filter structures were performed. Losses less than 1.5 dB at 38 GHz and less than 2 dB at 77 GHz have been obtained for both the silicon as well as for the GaAs based micromachined filters.

Paper Details

Date Published: 1 October 2001
PDF: 7 pages
Proc. SPIE 4559, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication, (1 October 2001); doi: 10.1117/12.443031
Show Author Affiliations
George Konstantinidis, FORTH-IESL (Greece)
Alexandru Mueller, National Institute for Research and Development in Microtechnologies (Romania)
George Deligiorgis, FORTH-IESL (Greece)
Ioana Petrini, National Institute for Research and Development in Microtechnologies (Romania)
Dan Vasilache, National Institute for Research and Development in Microtechnologies (Romania)
Dan Neculoiu, National Institute for Research and Development in Microtechnologies (Romania)
Michalis Lagadas, FORTH-IESL (Greece)
Cristina Buiculescu, National Institute for Research and Development in Microtechnologies (Romania)
Viorel Avramescu, National Institute for Research and Development in Microtechnologies (Romania)
Sergiu A. Iordanescu, National Institute for Research and Development in Microtechnologies (Romania)
Pierre Blondy, IRCOM (France)


Published in SPIE Proceedings Vol. 4559:
MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication
Henry Helvajian; Siegfried W. Janson; Franz Laermer, Editor(s)

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