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Proceedings Paper

Experimental microfluidics toolbox for MEMS characterization
Author(s): Steve T. Wereley; Carl D. Meinhart; Shannon Stone; Vince Hohreiter; Jacob Chung
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Paper Abstract

Flows in microscale domains are found in many places such as biomedical microdevices (Bio-MEMS), inkjet printer heads, micropropulsion systems, and microchannel networks, among many others. In fact, microfluidic devices represent the fastest growing and what is projected to be the dominant segment of the MEMS market. Because microscopic flows frequently display counter-intuitive behavior due to the different dominating forces at microscopic length scales, experimental diagnostic techniques are essential for characterizing microfluidic MEMS beharior. In recent work, we have developed several micron-scale fluidic diagnostic techniques. Micro-Particle Image Velocimetry (mPIV) measures the velocity of a flow by tracking the motion of small tracer particles seeded into the flow. To measure high velocity, small length scale flows, such as those found inside an inkjet, high-speed lasers and cameras are used in conjunction with a microscope to image the tracer particles with sub microsecond temporal resolution. Two extensions of the mPIV technique allow for flow boundary topology to be measured to with tens of nanometers and for the temperature of the flow to be measured. Combined, these three technique provide experimenters a very complete look at microfluidic device behavior at length scales on the order of 1 micron.

Paper Details

Date Published: 2 October 2001
PDF: 9 pages
Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); doi: 10.1117/12.443013
Show Author Affiliations
Steve T. Wereley, Purdue Univ. (United States)
Carl D. Meinhart, Univ. of California/Santa Barbara (United States)
Shannon Stone, Univ. of California/Santa Barbara (United States)
Vince Hohreiter, Univ. of Florida (United States)
Jacob Chung, Univ. of Florida (United States)

Published in SPIE Proceedings Vol. 4558:
Reliability, Testing, and Characterization of MEMS/MOEMS
Rajeshuni Ramesham, Editor(s)

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