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Proceedings Paper

Analysis and design of a capacitive accelerometer based on a electrostatically levitated microdisk
Author(s): Ruth P. Houlihan; Alena Kukharenka; Mircea Gindila; Michael Kraft
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Paper Abstract

A system-level model of an electrostatically actuated accelerometer is presented. The accelerometer comprises a proof mass levitated between an arrangement of upper and lower pie-shaped electrodes. The proof mass is an electroplated nickel disk, 1 mm in diameter and 200 micrometers thick. The position and orientation of the disk is detected by measuring the differential capacitance between the disk and each of the four upper and corresponding lower electrodes.

Paper Details

Date Published: 2 October 2001
PDF: 10 pages
Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); doi: 10.1117/12.443012
Show Author Affiliations
Ruth P. Houlihan, Univ. of Southampton (United Kingdom)
Alena Kukharenka, Univ. of Southampton (United Kingdom)
Mircea Gindila, Univ. of Southampton (United Kingdom)
Michael Kraft, Univ. of Southampton (United Kingdom)

Published in SPIE Proceedings Vol. 4558:
Reliability, Testing, and Characterization of MEMS/MOEMS
Rajeshuni Ramesham, Editor(s)

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