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Proceedings Paper

Characterization of an inchworm actuator fabricated by polysilicon surface micromachining
Author(s): Maarten P. de Boer; David L. Luck; Jeremy A. Walraven; James M. Redmond
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Paper Abstract

We describe the design, fabrication, test and preliminary analysis of a polycrystalline silicon MEMS inchworm actuator fabricated in a five level surface micromachining process. Large force generation (500 micronewtons), large range of motion (+/- 100 microns), small area requirements (600 X 200 um), small step size (10, 40 or 120 nanometers), and a large velocity range (0 to 90 microns per second) are demonstrated. We characterize force with a load cell whose range is calibrated on a logarithmic scale from micronewtons to millinewtons. We characterize out-of-plane displacement with interferometry, and in-plane displacement with Moire metrology sensitive to approximately 60 nm. The actuator serves well for testing friction under conditions of well- known applied pressure. We found that our surfaces exhibited a static coefficient of friction (cof) of approximately 0.3, and a dynamic cof of approximately 0.2. We also present initial wear studies for this device.

Paper Details

Date Published: 2 October 2001
PDF: 12 pages
Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); doi: 10.1117/12.443009
Show Author Affiliations
Maarten P. de Boer, Sandia National Labs. (United States)
David L. Luck, Univ. of Colorado/Boulder (United States)
Jeremy A. Walraven, Sandia National Labs. (United States)
James M. Redmond, Sandia National Labs. (United States)


Published in SPIE Proceedings Vol. 4558:
Reliability, Testing, and Characterization of MEMS/MOEMS
Rajeshuni Ramesham, Editor(s)

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