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Proceedings Paper

Printing systems for MEMS packaging
Author(s): Donald J. Hayes; Weldon Royall Cox; David B. Wallace
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Paper Abstract

Ink-jet printing technology is, in many ways, ideally suited for addressing a number of these MEMS device packaging challenges. The general advantages of this form of microdispensing derive from the incorporation of data-driven, non-contact processes which enable precise, picoliter-level volumes of material to be deposited with high accuracy and speed at target sites, even on non-planar surfaces. Being data-driven, microjet printing is a highly flexible and automated process which may readily be incorporated into manufacturing lines. It does not require application-specific tooling such as photomasks or screens, and, as an additive process with no chemical waste, it is environmentally friendly. In short, the advantages obtainable with incorporation of micro-jet printing technology in many fabrication applications range from increased process capability, integration and automation to reduced manufacturing costs.

Paper Details

Date Published: 2 October 2001
PDF: 9 pages
Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); doi: 10.1117/12.443003
Show Author Affiliations
Donald J. Hayes, MicroFab Technologies, Inc. (United States)
Weldon Royall Cox, MicroFab Technologies, Inc. (United States)
David B. Wallace, MicroFab Technologies, Inc. (United States)


Published in SPIE Proceedings Vol. 4558:
Reliability, Testing, and Characterization of MEMS/MOEMS
Rajeshuni Ramesham, Editor(s)

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