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Proceedings Paper

High-speed 3D optical imaging and failure analysis of high- and low-frequency movements in micro-electro-mechanical (MEMS) with nanometer resolution
Author(s): W. Merlijn van Spengen; Ingrid De Wolf; Bob Puers
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Paper Abstract

We report on the high-speed 3D imaging capabilities of a newly developed inspection tool for MEMS. The instrument is capable of performing an imaging operation for a complete image at once, which is a large advantage over scanning laser Doppler vibrometers and related equipment. This new instrument is able to `slow down' fringe movements when illuminating a MEMS device with a dedicated interferometer, by using a slow beat frequency between object excitation and reference beam excitation and averaging over a lot of phase images. It is used in such a way that an ordinary CCD camera can be used to obtain 3D images and movies of the periodic mechanical motion of MEMS devices, either in mechanical resonance when excited using a piezo actuator, or using electronic excitation with probe needles at any frequency required (up to the limitations of the waveform generators). Two modes of operation are possible: a mode in which slow deformations (seconds or more) can be monitored, and a mode in which fast periodic movements (100 Hz - 1 MHz) can be investigated. We show that this imaging technique is especially useful for the investigation of the mechanical behavior of MEMS, both to monitor the intended movement of a structure, and to have a close look at the erratic mechanical behavior of defective parts.

Paper Details

Date Published: 2 October 2001
PDF: 9 pages
Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); doi: 10.1117/12.443001
Show Author Affiliations
W. Merlijn van Spengen, IMEC and Katholieke Univ. Leuven (Belgium)
Ingrid De Wolf, IMEC (Belgium)
Bob Puers, Katholieke Univ. Leuven (Belgium)


Published in SPIE Proceedings Vol. 4558:
Reliability, Testing, and Characterization of MEMS/MOEMS
Rajeshuni Ramesham, Editor(s)

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