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Proceedings Paper

Design for reliability of MEMS/MOEMS for lightwave telecommunications
Author(s): Susanne Arney; Vladimir A. Aksyuk; David J. Bishop; Cristian A. Bolle; Robert E. Frahm; Arman Gasparyan; C. Randy Giles; Suresh Goyal; Flavio Pardo; Herbert R. Shea; Michael T. Lin; Carolyn D. White
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Paper Abstract

Optical Micro-Electro-Mechanical Systems (Optical MEMS, or MOEMS) comprise a disruptive technology whose application to telecommunications networks is transforming the horizon for lightwave systems. The influences of materials systems, processing subtleties, and reliability requirements on design flexibility, functionality and commercialization of MOEMS are complex. A tight inter-dependent feedback loop between Component/ Subsystem/ System Design, Fabrication, Packaging, Manufacturing and Reliability is described as a strategy for building reliability into emerging MOEMS products while accelerating their development into commercial offerings.

Paper Details

Date Published: 2 October 2001
PDF: 5 pages
Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); doi: 10.1117/12.442996
Show Author Affiliations
Susanne Arney, Lucent Technologies/Bell Labs. (United States)
Vladimir A. Aksyuk, Lucent Technologies/Bell Labs. (United States)
David J. Bishop, Lucent Technologies/Bell Labs. (United States)
Cristian A. Bolle, Lucent Technologies/Bell Labs. (United States)
Robert E. Frahm, Lucent Technologies/Bell Labs. (United States)
Arman Gasparyan, Lucent Technologies/Bell Labs. (United States)
C. Randy Giles, Lucent Technologies/Bell Labs. (United States)
Suresh Goyal, Lucent Technologies/Bell Labs. (United States)
Flavio Pardo, Lucent Technologies/Bell Labs. (United States)
Herbert R. Shea, Lucent Technologies/Bell Labs. (United States)
Michael T. Lin, Lucent Technologies/Bell Labs. (United States)
Carolyn D. White, Lucent Technologies/Bell Labs. (United States)


Published in SPIE Proceedings Vol. 4558:
Reliability, Testing, and Characterization of MEMS/MOEMS
Rajeshuni Ramesham, Editor(s)

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