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Proceedings Paper

Stroboscopic interferometry for characterization and improvement of flexural plate-wave transducers
Author(s): Christian Rembe; Pamela Caton; Richard M. White; Richard S. Muller
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Paper Abstract

We describe an improved stroboscopic interferometer system making possible static-deformation measurements of MEMS structures as well as motion measurements at frequencies up to 1MHz. The time resolution of the system is determined by the width of the strobed laser pulse. To demonstrate high-frequency measurement capabilities, we investigate acoustic waves on a flexural plate-wave micropump developed at the Berkeley Sensor & Actuator Center. We also characterize the micropump with a commercial micro scanning vibrometer (Polytec). The results are compared and different features of the two systems are discussed.

Paper Details

Date Published: 2 October 2001
PDF: 9 pages
Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); doi: 10.1117/12.442992
Show Author Affiliations
Christian Rembe, Univ. of California/Berkeley (Germany)
Pamela Caton, Univ. of California/Berkeley (United States)
Richard M. White, Univ. of California/Berkeley (United States)
Richard S. Muller, Univ. of California/Berkeley (United States)

Published in SPIE Proceedings Vol. 4558:
Reliability, Testing, and Characterization of MEMS/MOEMS
Rajeshuni Ramesham, Editor(s)

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