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Proceedings Paper

CNES reliability approach for the qualification of MEMS for space
Author(s): Francis Pressecq; Xavier Lafontan; Guy Perez; Jean-Pierre Fortea
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Paper Abstract

This paper describes the reliability approach performs at CNES to evaluate MEMS for space application. After an introduction and a detailed state of the art on the space requirements and on the use of MEMS for space, different approaches for taking into account MEMS in the qualification phases are presented. CNES proposes improvement to theses approaches in term of failure mechanisms identification. Our approach is based on a design and test phase deeply linked with a technology study. This workflow is illustrated with an example: the case of a variable capacitance processed with MUMPS process is presented.

Paper Details

Date Published: 2 October 2001
PDF: 8 pages
Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); doi: 10.1117/12.442990
Show Author Affiliations
Francis Pressecq, Ctr. National d'Etudes Spatiales (France)
Xavier Lafontan, Ctr. National d'Etudes Spatiales (France)
Guy Perez, Ctr. National d'Etudes Spatiales (France)
Jean-Pierre Fortea, Ctr. National d'Etudes Spatiales (France)

Published in SPIE Proceedings Vol. 4558:
Reliability, Testing, and Characterization of MEMS/MOEMS
Rajeshuni Ramesham, Editor(s)

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