Share Email Print
cover

Proceedings Paper

Reliable integration of piezoelectric lead zirconate titanate with MEMS fabrication processes
Author(s): Steven J. Gross; Qingqi Zhang; Srinivas Tadigadapa; Susan Trolier-McKinstry; Thomas N. Jackson; Frank T. Djuth
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The high piezoelectric effect of lead zirconate titanate (PZT) films enables improved performance in microelectromechanical systems (MEMS). The material's reliable integration into current and mainstream MEMS microfabrication processes is then of great interest. In this paper we report on high reliability fabrication processes that can be used for producing PZT based MEMS devices. Pattern definition and release of PZT, low stress silicon nitride, platinum, and/or zirconia structures via wet and dry chemical etching and ion beam etching, including their affects on the piezoelectric properties of PZT are reported. Ion beam etching results in appreciable imprint in the polarization - electric field hysteresis loop of the PZT, which can be ameliorated by annealing in ambient air at 450 degree(s)C. PZT on silicon nitride cantilever structures were defined and released by dry xenon difluoride silicon sacrificial etching. The advantages and difficulties of wet release etching versus xenon difluoride are also presented.

Paper Details

Date Published: 2 October 2001
PDF: 9 pages
Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); doi: 10.1117/12.442988
Show Author Affiliations
Steven J. Gross, The Pennsylvania State Univ. and Geospace Research, Inc. (United States)
Qingqi Zhang, The Pennsylvania State Univ. and Geospace Research, Inc. (United States)
Srinivas Tadigadapa, The Pennsylvania State Univ. (United States)
Susan Trolier-McKinstry, The Pennsylvania State Univ. (United States)
Thomas N. Jackson, The Pennsylvania State Univ. (United States)
Frank T. Djuth, Geospace Research, Inc. (United States)


Published in SPIE Proceedings Vol. 4558:
Reliability, Testing, and Characterization of MEMS/MOEMS
Rajeshuni Ramesham, Editor(s)

© SPIE. Terms of Use
Back to Top