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Proceedings Paper

Anodic alumina as a basis for various-purpose micro-electro-mechanical devices
Author(s): Georgy I. Efremov; Nikolay Ivanovich Mukhurov
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Paper Abstract

Applications prospects for micro-electro-mechanical devices and examples of their design as electrostatic micro-relays, dilatometric sensors, and arrow indicator heads are presented in the paper. Fabrication of these devices is based on unique possibilities of alumina technology to form various design elements in a single monolithic part, as well as on high physical and mechanical parameters of anodic alumina.

Paper Details

Date Published: 28 September 2001
PDF: 4 pages
Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); doi: 10.1117/12.442981
Show Author Affiliations
Georgy I. Efremov, Institute of Electronics (Belarus)
Nikolay Ivanovich Mukhurov, Institute of Electronics (Belarus)

Published in SPIE Proceedings Vol. 4557:
Micromachining and Microfabrication Process Technology VII
Jean Michel Karam; John A. Yasaitis, Editor(s)

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