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Proceedings Paper

Method to achieve large displacements using comb drive actuators
Author(s): Guangya Zhou; Duongsin Low; Philip Dowd
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Paper Abstract

The electromechanical side-instability and the stable travel range of comb-drive actuators are investigated. The stable travel range depends on the finger gap spacing, the initial finger overlap, and the spring stiffness ratio of the compliant suspension. Proper design of the suspension structure is the most effective way to stabilize the actuator and therefore to achieve a large deflection. In this paper, an improved suspension design, so called tilted folded-beam suspension, is proposed. The expressions for the spring constants of the proposed suspension both in and perpendicular to the stroke direction are given. Using such suspension, the stability of the comb-drive actuator is improved and the stable travel range is enhanced. Comb drive actuators with various tilted folded-beam suspensions were fabricated using the standard surface micromachining technology and their operational performances were characterized. The experimental results are in good agreement with the theoretical predictions.

Paper Details

Date Published: 28 September 2001
PDF: 8 pages
Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); doi: 10.1117/12.442975
Show Author Affiliations
Guangya Zhou, Nanyang Technological Univ. (Singapore)
Duongsin Low, Nanyang Technological Univ. (Singapore)
Philip Dowd, Nanyang Technological Univ. (United States)

Published in SPIE Proceedings Vol. 4557:
Micromachining and Microfabrication Process Technology VII
Jean Michel Karam; John A. Yasaitis, Editor(s)

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