Novel highly integrated microreactors have been fabricated on silicon in order to dehydrogenate cyclohexane to benzene. There are 12 reactor chips on one single silicon wafer. The microreactor consists of three layers, which are reaction chamber integrated with heaters and thermal sensors, separation layer integrated with cantilever flowmeters and gas cover.

Date Published: 28 September 2001
PDF: 5 pages
Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); doi: 10.1117/12.442974

Published in SPIE Proceedings Vol. 4557:
Micromachining and Microfabrication Process Technology VII
Jean Michel Karam; John A. Yasaitis, Editor(s)