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Proceedings Paper

Modeling of the comb actuator deformed by microloading effect in deep reactive ion etching
Author(s): June-Young Lee; Seong-Hyok Kim; Hyung-Taek Lim; Che-Heung Kim; Yong-Kweon Kim
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Paper Abstract

The comb actuator deformed by microloading effect in DRIE process generally has í«Lí» shape comb electrodes. Therefore, the actuator shows nonlinear differential driving characteristics. A simple modeling is suggested and simulated to explain the driving characteristics. For modeling convenience, the damaged comb electrode is assumed to be a simple í«Lí» shape. According to the modeling, the resonant frequency is estimated to increase as the bias voltage increases. The static displacement curve shows í«Sí» shape.

Paper Details

Date Published: 28 September 2001
PDF: 11 pages
Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); doi: 10.1117/12.442952
Show Author Affiliations
June-Young Lee, Seoul National Univ. (South Korea)
Seong-Hyok Kim, Seoul National Univ. (South Korea)
Hyung-Taek Lim, Seoul National Univ. (South Korea)
Che-Heung Kim, Seoul National Univ. (South Korea)
Yong-Kweon Kim, Seoul National Univ. (South Korea)


Published in SPIE Proceedings Vol. 4557:
Micromachining and Microfabrication Process Technology VII
Jean Michel Karam; John A. Yasaitis, Editor(s)

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