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Proceedings Paper

Micromachined silicon slits for beam diagnostics in particle accelerators
Author(s): Elena Cianci; Andrea Notargiacomo; Alessandro Cianchi; Vittorio Foglietti
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Paper Abstract

We report the fabrication process of a silicon target with a rectangular slit as an instrument for measuring the size and the angular divergence of high charge-density electron beams in particles accelerators. Bulk micromachining of silicon wafers by means of anisotropic etching allowed the definition of slits with parallel straight edges and low disuniformity. The disuniformities of the completed device evaluated by scanning electron microscopy were found to be tolerable with respect to the wavelength used in the experiments. Tests of the fabricated targets are in progress in the injector of ELETTRA, the synchrotron radiation facility in Trieste, Italy.

Paper Details

Date Published: 28 September 2001
PDF: 8 pages
Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); doi: 10.1117/12.442951
Show Author Affiliations
Elena Cianci, Istituto di Elettronica dello Stato Solido (Italy)
Andrea Notargiacomo, Univ. degli Studi di Roma Tre (Italy)
Alessandro Cianchi, Univ. degli Studi di Roma "Tor Vergata" (Italy)
Vittorio Foglietti, Istituto di Elettronica dello Stato Solido (Italy)


Published in SPIE Proceedings Vol. 4557:
Micromachining and Microfabrication Process Technology VII
Jean Michel Karam; John A. Yasaitis, Editor(s)

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