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Proceedings Paper

Ultraprecision manufacturing of self-assembled microsystems
Author(s): Andre Sharon; Axel Bilsing; Gordon Lewis
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Paper Abstract

This paper introduces a new microfabrication technique that combines ultraprecision micro machining (milling, turning, drilling, and grinding) with sacrificial/structural multi-layer manufacturing processes to produce assembled, three-dimensional microsystems. These systems can comprise true 3-dimensional features that span in size from micrometers through millimeters and can be manufactured from a variety of metallic and polymer materials.

Paper Details

Date Published: 28 September 2001
PDF: 9 pages
Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); doi: 10.1117/12.442945
Show Author Affiliations
Andre Sharon, Boston Univ. (United States)
Axel Bilsing, Boston Univ. and Fraunhofer USA Ctr. for Manufacturing Innovation (United States)
Gordon Lewis, Fraunhofer USA Ctr. for Manufacturing Innovation (United States)


Published in SPIE Proceedings Vol. 4557:
Micromachining and Microfabrication Process Technology VII
Jean Michel Karam; John A. Yasaitis, Editor(s)

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