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Proceedings Paper

MEMS/MOEMS application to optical communication
Author(s): Hiroyuki Fujita
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Paper Abstract

The paper describes brief summary of current MEMS technology and its application to optics. The optical application is one of the most important applications of MEMS because of two reasons; one is that the micromachine technology can provide high performances and new functionalities for optical systems and the other is that those optical microsystems can satisfy market demands for optical communication networks, displays, data storage and sensors. Opportunities for MEMS-based devices in optical communication networks are discussed. Some specific examples of MEMS optical switches are described.

Paper Details

Date Published: 28 September 2001
PDF: 7 pages
Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); doi: 10.1117/12.442944
Show Author Affiliations
Hiroyuki Fujita, Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 4557:
Micromachining and Microfabrication Process Technology VII
Jean Michel Karam; John A. Yasaitis, Editor(s)

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