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Proceedings Paper

Mechanical gripper system for handling and assembly in MEMS
Author(s): Dragan Petrovic; Gordana Popovic; Elias Chatzitheodoridis; Oscar Del Medico; Ana Almansa; Helmut Detter; Werner Brenner
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Paper Abstract

Nowadays the application of specially designed grippers in micro technology is an important topic and a necessity for the industrialisation. In order to transfer the manual assembly of micro electro mechanical system (MEMS) to an automatic assembly process, specially designed handling tools with sensing capabilities are required. Keeping the dimensions of the microparts in mind the handling and assembly process requires supervision with microscopes, positioning with high precision and application of specially designed tools. This paper describes a miniaturised mechanical gripper system with specially designed grippers and with implemented force-feedback for general microassembly purpose. The described grippers are fabricated from spring steel by wire electro-discharge-machining (EDM). The design of the microgripping system allows handling of pieces with sizes from 10 micrometers up to 2 mm.

Paper Details

Date Published: 28 September 2001
PDF: 6 pages
Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); doi: 10.1117/12.442937
Show Author Affiliations
Dragan Petrovic, Technische Univ. Wien (Austria)
Gordana Popovic, Technische Univ. Wien (Austria)
Elias Chatzitheodoridis, Technische Univ. Wien (Austria)
Oscar Del Medico, INOCON Technologie GmbH (Austria)
Ana Almansa, Technische Univ. Wien (Austria)
Helmut Detter, Technische Univ. Wien (Austria)
Werner Brenner, Technische Univ. Wien (Austria)

Published in SPIE Proceedings Vol. 4557:
Micromachining and Microfabrication Process Technology VII
Jean Michel Karam; John A. Yasaitis, Editor(s)

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