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Proceedings Paper

Excimer laser surface micromachining of LiNbO3 for realization of optimized optical modulator electrode structures
Author(s): Han-Woo Chong; Arnan Mitchell; Jason P. Hayes; Michael W. Austin
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Paper Abstract

An investigation of the micromachining of trenches in lithium niobate (LiNbO3) using direct imaged 248 nm KrF (krypton fluoride) excimer laser photoablation is presented. High resolution trenches, 2-20 micrometers wide and 0.5-7.5 micrometers depth have been produced. These trenches are assessed and are deemed suitable for the machining of integrated optic structures with particular application in the enhancement of electrodes for broadband optical intensity modulators.

Paper Details

Date Published: 28 September 2001
PDF: 10 pages
Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); doi: 10.1117/12.442934
Show Author Affiliations
Han-Woo Chong, RMIT Univ. (Australia)
Arnan Mitchell, RMIT Univ. (Australia)
Jason P. Hayes, Swinburne Univ. of Technology (Australia)
Michael W. Austin, RMIT Univ. (Australia)

Published in SPIE Proceedings Vol. 4557:
Micromachining and Microfabrication Process Technology VII
Jean Michel Karam; John A. Yasaitis, Editor(s)

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