Share Email Print

Proceedings Paper

Thinned backside-illuminated cooled CCDs for UV and VUV applications
Author(s): Ilia Nikolaevic Dalinenko; G. A. Kuz'min; Alexandre Victorovic Malyarov; Alexander M. Prokhorov; Mikhail Ya. Schelev
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

It is well known that thinned backside-illuminated CCD image sensors are very efficient for electron beam imaging. The authors have adapted an electron-bombarded (EB) CCD for application in UV and VUV spectral regions. This adaptation includes the creation of a shallow accumulation layer near the device backside surface either by ion implantation and annealing or by a certain chemical treatment of the surface. Preliminary experimental results confirm the applicability of the developed procedure in achieving a reasonable quantum efficiency. Some problems associated with the UV and VUV imagers design and fabrication are discussed.

Paper Details

Date Published: 1 June 1991
PDF: 6 pages
Proc. SPIE 1449, Electron Image Tubes and Image Intensifiers II, (1 June 1991); doi: 10.1117/12.44276
Show Author Affiliations
Ilia Nikolaevic Dalinenko, All-Union Research Institute Electron (Russia)
G. A. Kuz'min, All-Union Research Institute Electron (Russia)
Alexandre Victorovic Malyarov, All-Union Research Institute Electron (Russia)
Alexander M. Prokhorov, General Physics Institute (Russia)
Mikhail Ya. Schelev, General Physics Institute (Russia)

Published in SPIE Proceedings Vol. 1449:
Electron Image Tubes and Image Intensifiers II
Illes P. Csorba, Editor(s)

© SPIE. Terms of Use
Back to Top