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Proceedings Paper

Rough alignment system using moire gratings for lithography
Author(s): Hideo Furuhashi; Masayuki Uchida; Yoshiyuki Uchida; Vijay Trimbak Chitnis
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Paper Abstract

Some types of rough alignment system for pre-alignment of precise alignment is proposed. One is a system using wide pitch gratings, with narrow pitch gratings for precise alignment. The other is a system using only narrow pitch gratings with small slit number, which is simple in construction. The operations are discussed on the basis of the results of computer simulation.

Paper Details

Date Published: 25 September 2001
PDF: 8 pages
Proc. SPIE 4417, Photonics 2000: International Conference on Fiber Optics and Photonics, (25 September 2001); doi: 10.1117/12.441354
Show Author Affiliations
Hideo Furuhashi, Aichi Institute of Technology (Japan)
Masayuki Uchida, Aichi Institute of Technology (Japan)
Yoshiyuki Uchida, Aichi Institute of Technology (Japan)
Vijay Trimbak Chitnis, National Physical Lab. (India)

Published in SPIE Proceedings Vol. 4417:
Photonics 2000: International Conference on Fiber Optics and Photonics
S. K. Lahiri; Ranjan Gangopadhyay; Asit K. Datta; Samit K. Ray; B. K. Mathur; S. Das, Editor(s)

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