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Proceedings Paper

Light addressable potentiometric sensor with an array of sensing regions
Author(s): Weiguo Liang; JingHong Han; Hong Zhang; Deyong Chen
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Paper Abstract

This paper describes the mechanism of light addressable poteniometric sensors (LAPS) from the viewpoints of Semiconductor Physics, and introduces the fabrication of a multi-parameter LAPS chip. The MEMS technology is applied to produce a matrix of sensing regions on the wafer. By doing that, the cross talk among these regions is reduced, and the precision of the LAPS is increased. An IR-LED matrix is used as the light source, and the flow-injection method is used to input samples. The sensor system is compact and highly integrated. The measure and control system is composed of a personal computer, a lock-in amplifier, a potentiostat, a singlechip system, and an addressing circuit. Some experiments have been done with this device. The results show that this device is very promising for practical use.

Paper Details

Date Published: 14 September 2001
PDF: 4 pages
Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); doi: 10.1117/12.440239
Show Author Affiliations
Weiguo Liang, Institute of Electronics (China)
JingHong Han, Institute of Electronics (China)
Hong Zhang, Institute of Electronics (China)
Deyong Chen, Institute of Electronics (China)

Published in SPIE Proceedings Vol. 4414:
International Conference on Sensor Technology (ISTC 2001)
Yikai Zhou; Shunqing Xu, Editor(s)

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