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Proceedings Paper

Ferroelectric PbTiO3 thin films
Author(s): Lin-Tao Zhang; Tian-Ling Ren; Li-Tian Liu; Zhijian Li
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Paper Abstract

Ferroelectric thin films of PbTiO3 deposited on silicon substrates by sol-gel method. X-ray diffraction analysis shows that the PT thin films are well crystallized. Electrical and ferroelectric properties such as capacitance- voltage, polarization-field, dielectric-frequency, leakage current, and fatigue properties of the PT thin films are tested. Experimental result of the PT thin films shows that these thin films have quite good ferroelectric and electrical properties.

Paper Details

Date Published: 14 September 2001
PDF: 4 pages
Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); doi: 10.1117/12.440236
Show Author Affiliations
Lin-Tao Zhang, Tsinghua Univ. (China)
Tian-Ling Ren, Tsinghua Univ. (China)
Li-Tian Liu, Tsinghua Univ. (China)
Zhijian Li, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 4414:
International Conference on Sensor Technology (ISTC 2001)
Yikai Zhou; Shunqing Xu, Editor(s)

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