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Proceedings Paper

Novel micro electromagnetic relay based on MEMS technology
Author(s): Yufeng Zhang; Desheng Li; Donghong Wang
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Paper Abstract

This paper presents a novel method for the fabrication of micro electromagnetic relays based on MEMS technology. Fabrication process and the partial test results are given in detail. Th emian advantages of the micro relay include small volume, low weight, rapid response, and longevity. In addition, it takes the performance between the common electromagnetic relay and the solid-state one, thus the proposed micro relay may be promising in the future.

Paper Details

Date Published: 14 September 2001
PDF: 4 pages
Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); doi: 10.1117/12.440232
Show Author Affiliations
Yufeng Zhang, Harbin Institute of Technology (China)
Desheng Li, Harbin Institute of Technology (China)
Donghong Wang, Harbin Institute of Technology (China)

Published in SPIE Proceedings Vol. 4414:
International Conference on Sensor Technology (ISTC 2001)
Yikai Zhou; Shunqing Xu, Editor(s)

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