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Proceedings Paper

Novel VME pressure sensor
Author(s): Shanhong Xia; Shaofeng Chen; Qiang Bai
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Paper Abstract

This paper presents the theoretical investigation, design, fabrication, package and experimental measurement of a novel vacuum microelectronic (VME) pressure sensor. A new configuration, named 'cathode-on-membrane', greatly reduces the difficulties in the package process and enables practical VME pressures sensors to be developed. Computer simulation and computer aided design have been used to theoretically investigate the properties of the sensor and to optimize its structure. Experimental studies and results are reported, for the first time, revealing the characteristics of the sensor output current varying with applied pressure under different anode voltages.

Paper Details

Date Published: 14 September 2001
PDF: 4 pages
Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); doi: 10.1117/12.440219
Show Author Affiliations
Shanhong Xia, Institute of Electronics (China)
Shaofeng Chen, Institute of Electronics (China)
Qiang Bai, Institute of Electronics (China)


Published in SPIE Proceedings Vol. 4414:
International Conference on Sensor Technology (ISTC 2001)

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