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Proceedings Paper

Novel four-beam piezoresistive accelerometer
Author(s): Zhaohua Zhang; Litian Liu; Mingsheng Wen
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Paper Abstract

Piezo resistive silicon accelerometers have many excellent performance characteristics such as high sensitivity, high reliability and low cost. In this paper, a novel Piezo resistive silicon accelerometer is presented. This accelerometer has four beams. Such structure can not only decrease cross-axis sensitivity, but also utilize the full of strain caused by acceleration. Using Finite-Element Analysis (FEA) software, we did strain simulation in order to analyze the stress distribution. The result of finite- element method simulation accorded with theory analysis very much. Layout design and fabrication process result of finite-element method simulation accorded with theory analysis very much. Layout design and fabrication process of this accelerometer are presented in this paper, also, During fabrication process, a novel double side alignment was introduced. We also changed the release process of the sensor proof masses. This can make reject rate become very small.

Paper Details

Date Published: 14 September 2001
PDF: 4 pages
Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); doi: 10.1117/12.440210
Show Author Affiliations
Zhaohua Zhang, Tsinghua Univ. (China)
Litian Liu, Tsinghua Univ. (China)
Mingsheng Wen, Jishou Univ. (China)


Published in SPIE Proceedings Vol. 4414:
International Conference on Sensor Technology (ISTC 2001)

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