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Proceedings Paper

Analysis of the structure of a high-g-force MEMS accelerometer
Author(s): Ping Song; Kejie Li; Gengchen Shi
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Paper Abstract

In this paper, several micro-mechanical structures of high g-force MEMS accelerometers will be analyzed; their characteristics will be discussed. Finally, a structure with new features will be given.

Paper Details

Date Published: 14 September 2001
PDF: 3 pages
Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); doi: 10.1117/12.440208
Show Author Affiliations
Ping Song, Beijing Institute of Technology (China)
Kejie Li, Beijing Institute of Technology (China)
Gengchen Shi, Beijing Institute of Technology (China)

Published in SPIE Proceedings Vol. 4414:
International Conference on Sensor Technology (ISTC 2001)
Yikai Zhou; Shunqing Xu, Editor(s)

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