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Proceedings Paper

Monolithic triaxial accelerometer design in thick-film technology
Author(s): Zhongcheng Wu; Yu Ge; Zengfu Wang
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Paper Abstract

A monolithic triaxial accelerometers based on thick-film technology is presented, and its structure and operating principle are discussed in this paper. Design and fabrication for the accelerometers are described together with theoretical predications and FEM analysis. The sensing elements on elastic membrane were analyzed in particular by COSMOS/M FEM and its geometric structure parameters were optimized. The overall performance of the device suggests that with proper control of screen-printing and firing processes, many applications in advanced industrial requirements will be possible in the near future.

Paper Details

Date Published: 14 September 2001
PDF: 4 pages
Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); doi: 10.1117/12.440205
Show Author Affiliations
Zhongcheng Wu, Institute of Intelligent Machines and Univ. of Science and Technology of China (China)
Yu Ge, Institute of Intelligent Machines (China)
Zengfu Wang, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 4414:
International Conference on Sensor Technology (ISTC 2001)
Yikai Zhou; Shunqing Xu, Editor(s)

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