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Proceedings Paper

Theoretical study of surface MEMS rf switch structure
Author(s): Ming Jia; Fangmin Guo; Ziqiang Zhu; Zongsheng Lai; Jianpeng Chu; Yaolin Wang; Xiaohong Ge; Yirong Yang
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Paper Abstract

We simulate the structure of surface MEMS RF switch by suing ANSYS electrostatic and mechanical energy coupled analysis with established models. In this paper actuation voltage for different geometrical scales of suspended beam contacted switch are discussed. The dependence of actuation voltage on the Yang's module, size of cantilever and electrode area is calculated.

Paper Details

Date Published: 14 September 2001
PDF: 4 pages
Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); doi: 10.1117/12.440199
Show Author Affiliations
Ming Jia, East China Normal Univ. (China)
Fangmin Guo, East China Normal Univ. (China)
Ziqiang Zhu, East China Normal Univ. (China)
Zongsheng Lai, East China Normal Univ. (China)
Jianpeng Chu, East China Normal Univ. (China)
Yaolin Wang, Shanghai Institute of Metallurgy (China)
Xiaohong Ge, Shanghai Institute of Metallurgy (China)
Yirong Yang, Shanghai Institute of Metallurgy (China)

Published in SPIE Proceedings Vol. 4414:
International Conference on Sensor Technology (ISTC 2001)
Yikai Zhou; Shunqing Xu, Editor(s)

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