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Proceedings Paper

Ozone sensor with hsgfet and its characteristic
Author(s): Wencheng Niu; Yunfang Jia; Huawei Li; Xingbo Na; Jiexiang Xie; Fuhai Zhang; Weidong Luo; Yaguang Zhou; Jun Yu
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Paper Abstract

On the basis of character of work function shift caused by the interaction of pure or hybrid indium oxide with ozone, we developed ozone sensor with HSGFET operating at room temperature. And analyzed the response character of the samples.

Paper Details

Date Published: 14 September 2001
PDF: 3 pages
Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); doi: 10.1117/12.440188
Show Author Affiliations
Wencheng Niu, Nankai Univ. (China)
Yunfang Jia, Nankai Univ. (China)
Huawei Li, Nankai Univ. (China)
Xingbo Na, Nankai Univ. (China)
Jiexiang Xie, Nankai Univ. (China)
Fuhai Zhang, Nankai Univ. (China)
Weidong Luo, Nankai Univ. (China)
Yaguang Zhou, Nankai Univ. (China)
Jun Yu, Nankai Univ. (China)


Published in SPIE Proceedings Vol. 4414:
International Conference on Sensor Technology (ISTC 2001)

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