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Proceedings Paper

New method of weak frequency variation detection in silicon microresonator
Author(s): Xiangyang Zhao; Junhua Liu; Baizhou Shi
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Paper Abstract

It is needed to enhance sensitivity and resolving power in microresonators, which give weak frequency variation in perceiving pressure and temperature. The simulated extraction of weak frequency variation is carried out with the manifesting resonant frequency-locking property when system transits from chaotic to great periodic motion. With signal preprocessing used bandpass sampling and down sampling, measurement system is founded based on chaos. At the same time it is pointed out that the system can realize flexible measurement in silicon microresonators.

Paper Details

Date Published: 14 September 2001
PDF: 4 pages
Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); doi: 10.1117/12.440138
Show Author Affiliations
Xiangyang Zhao, Xi'an Jiaotong Univ. (China)
Junhua Liu, Xi'an Jiaotong Univ. (China)
Baizhou Shi, Xi'an Jiaotong Univ. (China)


Published in SPIE Proceedings Vol. 4414:
International Conference on Sensor Technology (ISTC 2001)

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