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Proceedings Paper

Design of a rf-MEMS BAW filter using surface micromachining
Author(s): Peng Cong; Yanxiang Liu; Tian-Ling Ren; Li-Tian Liu
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Paper Abstract

A novel structure of front end passband bulk acoustic wave (BAW) filter using surface micromachining in is designed. The advantages and disadvantages of fabricating BAW RF filter using surface and bulk micromachining are discussed. The analytical solutions of the wave equation for the electrode-piezoelectrics-electrode sandwich structure on support film in the BAW RF resonators are presented.

Paper Details

Date Published: 14 September 2001
PDF: 4 pages
Proc. SPIE 4414, International Conference on Sensor Technology (ISTC 2001), (14 September 2001); doi: 10.1117/12.440130
Show Author Affiliations
Peng Cong, Tsinghua Univ. (China)
Yanxiang Liu, Tsinghua Univ. (China)
Tian-Ling Ren, Tsinghua Univ. (China)
Li-Tian Liu, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 4414:
International Conference on Sensor Technology (ISTC 2001)
Yikai Zhou; Shunqing Xu, Editor(s)

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