Share Email Print
cover

Proceedings Paper

Novel focal plane array integration technology for use in eye-safe imaging ladar receivers
Author(s): Kenneth Vaccaro; Stephen M. Spaziani; Helen M. Dauplaise; Darlene Schwall; Mark Roland; James E. Murguia; Joseph P. Lorenzo
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A novel integration technology for the fabrication of active, or passive, focal plane array imagers has been developed. The integration scheme is based on the transfer of epitaxial layers to a surrogate substrate without critical alignment. Once the epitaxial layer is successfully transferred to the surrogate substrate, photodetector isolation, passivation, and fabrication are completed. To demonstrate the potential of the process, 320 x 256 arrays of InGaAs mesas were successfully transferred onto commercially-available focal plane array readout integrated circuits. Pitch and pixel resolution are limited by the available standard photolithography. InGaAs mesas transferred to silicon wafers with a pitch as small as 10 microns have been demonstrated. The process was optimized for the fabrication of high-performance vertical Schottky photodiodes. Dark-currents below 5 nA were observed with 44 mm diameter photodiodes. Responsivities of 0.55 A/W were obtained with a 1 micron InGaAs absorber. The new integration process can be used to easily achieve photodiodes with bandwidths higher than 20 GHz, without the use of an air-bridge.

Paper Details

Date Published: 19 September 2001
PDF: 8 pages
Proc. SPIE 4377, Laser Radar Technology and Applications VI, (19 September 2001); doi: 10.1117/12.440099
Show Author Affiliations
Kenneth Vaccaro, Air Force Research Lab. (United States)
Stephen M. Spaziani, Air Force Research Lab. (United States)
Helen M. Dauplaise, Air Force Research Lab. (United States)
Darlene Schwall, Solid State Scientific Corp. (United States)
Mark Roland, Solid State Scientific Corp. (United States)
James E. Murguia, Solid State Scientific Corp. (United States)
Joseph P. Lorenzo, Air Force Research Lab. (United States)


Published in SPIE Proceedings Vol. 4377:
Laser Radar Technology and Applications VI
Gary W. Kamerman, Editor(s)

© SPIE. Terms of Use
Back to Top