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Proceedings Paper

Interferometric length and roughness measurements with nanometer accuracy level
Author(s): Alexandre Titov; Igor Malinovsky; H. Belaidi; R. S. Franca; C. A. Massone
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Paper Details

Date Published: 11 September 2001
PDF: 12 pages
Proc. SPIE 4420, Laser Metrology for Precision Measurement and Inspection in Industry, (11 September 2001); doi: 10.1117/12.439212
Show Author Affiliations
Alexandre Titov, National Metrology Institute (Brazil)
Igor Malinovsky, National Metrology Institute (Brazil)
H. Belaidi, National Metrology Institute (Brazil)
R. S. Franca, National Metrology Institute (Brazil)
C. A. Massone, National Metrology Institute (Brazil)


Published in SPIE Proceedings Vol. 4420:
Laser Metrology for Precision Measurement and Inspection in Industry

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