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Proceedings Paper

Laser-based measurement to nanometer scale accuracy
Author(s): Gerd Jaeger
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Paper Abstract

A laser-interferometric miniature measuring system designed for precision measurements in the fields of micro-, nano- and macro technology is being presented. In measuring ranges of >= 2 m, a resolution of <EQ 1 nm and an accuracy of only a few nanometers can be achieved. On the basis of various practical applications of the 2D- and 3D-nano- measuring and positioning techniques, the particular advantages offered by the optical fiber-coupled laser- interferometric measuring system are explained.

Paper Details

Date Published: 11 September 2001
PDF: 10 pages
Proc. SPIE 4420, Laser Metrology for Precision Measurement and Inspection in Industry, (11 September 2001); doi: 10.1117/12.439211
Show Author Affiliations
Gerd Jaeger, Ilmenau Technical Univ. (Germany)


Published in SPIE Proceedings Vol. 4420:
Laser Metrology for Precision Measurement and Inspection in Industry

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