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Proceedings Paper

Traceable measurement results from scanning probe microscopes by laser interferometry
Author(s): K. Hasche; Konrad Herrmann; R. Seemann; Hans-Joachim Buechner
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Paper Abstract

A commercial scanning force microscope (SFM) has been equipped with an additional 3D position measurement system consisting of three miniature laser interferometers. This modification serves to further improve its metrological performance and calibration. This SFM is applied to topographical measurements including several types of calibration. In order to avoid the influence of Abbe errors two new interferometers have been implemented in the SFM. From this results a reduction of the measurement uncertainty. Furthermore, we report on a combination of the SFM including incorporated laser interferometers with a sophisticated detection system of another commercial scanning probe microscope. This enables to analyze further interactions between probe and specimen.

Paper Details

Date Published: 11 September 2001
PDF: 8 pages
Proc. SPIE 4420, Laser Metrology for Precision Measurement and Inspection in Industry, (11 September 2001); doi: 10.1117/12.439210
Show Author Affiliations
K. Hasche, Physikalisch-Technische Bundesanstalt (Germany)
Konrad Herrmann, Physikalisch-Technische Bundesanstalt (Germany)
R. Seemann, Physikalisch-Technische Bundesanstalt (Germany)
Hans-Joachim Buechner, Ilmenau Technical Univ. (Germany)


Published in SPIE Proceedings Vol. 4420:
Laser Metrology for Precision Measurement and Inspection in Industry

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