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Proceedings Paper

New generation of lasermike
Author(s): Ryszard Jablonski; Pawel Fotowicz
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Paper Abstract

Lasermikes (LMS) measure linear displacement indirectly - through angle and time measuring, assuming constant scan velocity. In order to meet present accuracy requirements the direct method of angular position measurements and the optimization of the system is proposed. The method is based on angular laser microinterferometer measuring directly the deflector scan angle. The obtained resolution was 0.02 inch. The analytical considerations of detector signal led to the creation of 'hump phenomenon' - formed by the light reflected from the object surface and having the decisive influence on the form of detector signal. It is proved that the detector error can be significantly reduced by optimizing the detector system according to the object size and reflectivity. The paper contains the description of the angular laser microinterferometer and its metrological properties and the analysis of detector output signal when scanning the cylindrical object with focused laser beam. It was proved that by introduction of the direct angle measuring method and optimization of the system, the required accuracy of lasermikes can be achieved.

Paper Details

Date Published: 11 September 2001
PDF: 8 pages
Proc. SPIE 4420, Laser Metrology for Precision Measurement and Inspection in Industry, (11 September 2001); doi: 10.1117/12.439198
Show Author Affiliations
Ryszard Jablonski, Warsaw Univ. of Technology (Poland)
Pawel Fotowicz, Warsaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 4420:
Laser Metrology for Precision Measurement and Inspection in Industry

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