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Proceedings Paper

Optimization of fabrication process for dual-trench-type alternating PSM
Author(s): Tooru Komizo; Ichiro Kagami; Daichi Kakuta; Hiroichi Kawahira
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Paper Abstract

We have optimized a fabrication process of an alternating phase shift mask (alt-PSM) with dual trench structure. In quartz etching process using a RIE system, one of the key issues is to obtain a precise controllability of phase mean to target. In order to improve a phase controllability, re- etching process using an etching depth monitoring method with atomic force microscopy is applied in actual fabrication process. With regard to phase uniformity and resist selectivity for quartz, etching conditions such as RF power, pressure, and gas concentration are optimized by orthogonal design method. To improve a sidewall profile of quartz, the effect of inert gas is also examined. Under the practical etching process, phase man to target within +/- 5 degree(s) is obtained. Phase uniformity is improved within 1.0 degree(s). Sidewall profile is improve within 87 degree(s). Optical intensity balance between shallow and deep trench apertures is obtained completely equal from AIMS evaluation result.

Paper Details

Date Published: 5 September 2001
PDF: 7 pages
Proc. SPIE 4409, Photomask and Next-Generation Lithography Mask Technology VIII, (5 September 2001); doi: 10.1117/12.438341
Show Author Affiliations
Tooru Komizo, Sony Corp. (Japan)
Ichiro Kagami, Sony Corp. (Japan)
Daichi Kakuta, Sony Corp. (Japan)
Hiroichi Kawahira, Sony Corp. (Japan)


Published in SPIE Proceedings Vol. 4409:
Photomask and Next-Generation Lithography Mask Technology VIII
Hiroichi Kawahira, Editor(s)

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