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Proceedings Paper

Application of tunable diode lasers in control of high-pure-material technologies
Author(s): Alexander I. Nadezhdinskii; Eugene V. Stepanov; Andrian I. Kouznetsov; Grigory G. Devyatykh; G. A. Maximov; V. A. Khorshev; S. M. Shapin
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Paper Abstract

Diode laser spectrometer for trace molecules' analysis in high-pure volatile substances has been developed. Spectrometer is equipped with heated evacuated system for gas input and gas mixtures' preparation. Analytical parameters were estimated for water traces determination in oxygen, argon, and monogermane. Detection limit was equal to 8 ppb, 4 ppb, and 4 ppb respectively for these gas-matrixes with 1.5 m optical path length.

Paper Details

Date Published: 1 July 1991
PDF: 9 pages
Proc. SPIE 1418, Laser Diode Technology and Applications III, (1 July 1991); doi: 10.1117/12.43834
Show Author Affiliations
Alexander I. Nadezhdinskii, General Physics Institute (Russia)
Eugene V. Stepanov, General Physics Institute (Russia)
Andrian I. Kouznetsov, Engelharb Sensor Technologies (United States)
Grigory G. Devyatykh, Institute of High-Pure-Material Chemistry (Russia)
G. A. Maximov, Institute of High-Pure-Material Chemistry (Russia)
V. A. Khorshev, Institute of High-Pure-Material Chemistry (Russia)
S. M. Shapin, Institute of High-Pure-Material Chemistry (Russia)


Published in SPIE Proceedings Vol. 1418:
Laser Diode Technology and Applications III
Daniel S. Renner, Editor(s)

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