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Proceedings Paper

Scan linearity: a hidden factor in SEM magnification calibration
Author(s): Albert Sicignano; Arkady V. Nikitin; Dmitriy Y. Yeremin; Matthew Sandy; E. Tim Goldburt
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Paper Details

Date Published: 24 July 2002
PDF: 8 pages
Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.437972
Show Author Affiliations
Albert Sicignano
Arkady V. Nikitin
Dmitriy Y. Yeremin
Matthew Sandy
E. Tim Goldburt


Published in SPIE Proceedings Vol. 4608:
Nanostructure Science, Metrology, and Technology

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