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Proceedings Paper

Monolithic two-dimensional surface-emitting laser diode arrays with 45 degree micromirrors
Author(s): Michael Jansen; Jane J. Yang; Szutsun Simon Ou; Moshe Sergant; Luke J. Mawst; John Rozenbergs; Jaroslava Z. Wilcox; Dan Botez
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Paper Abstract

Development and performance of large area (0.5 cm2) junction-down monolithic two- dimensional surface-emitting arrays is reported. This involves fabrication of 45 degree(s) and vertical micromirrors with +/- 2 degree(s) tolerances and < 0.2 RMS smoothness, lapping and polishing of 2 in. diameter wafers with < 10 micrometers thickness tolerances, integration of 100 micrometers thick current spreading electrodes which minimize ohmic losses, large area packaging, and mounting to heat exchangers for long pulse operation and minimum chirp. Single monolithic surface emitter diodes exhibit superior performance (slope efficiencies of (eta) d > 50%, threshold currents of Ith equals 220 mA, and output powers in excess of 720 mW). This projects to power densities > 860 W/cm2 and > 50% differential slope efficiencies for arrays of devices. Large area array operation (scaling) was demonstrated. Uniform lasing was achieved from 0.2 cm X 0.5 cm and 0.5 cm X 1.0 cm active area junction-down monolithic arrays (120 and 600 emitters respectively) using 100 microsecond(s) ec long pulses at a 1% duty cycle. Differential slope efficiencies of > 40% were achieved for rows of 12 emitters, and 8% for the large area arrays. The drop in efficiency was due to current leakage, which limited the output power densities to 150 W/cm2. Chirp in these devices was measured to be < 4 nm at twice the threshold current.

Paper Details

Date Published: 1 July 1991
PDF: 8 pages
Proc. SPIE 1418, Laser Diode Technology and Applications III, (1 July 1991); doi: 10.1117/12.43792
Show Author Affiliations
Michael Jansen, TRW Space and Technology Group (United States)
Jane J. Yang, TRW Space and Technology Group (United States)
Szutsun Simon Ou, TRW Space and Technology Group (United States)
Moshe Sergant, TRW Space and Technology Group (United States)
Luke J. Mawst, TRW Space and Technology Group (United States)
John Rozenbergs, TRW Space and Technology Group (United States)
Jaroslava Z. Wilcox, TRW Space and Technology Group (United States)
Dan Botez, TRW Space and Technology Group (United States)


Published in SPIE Proceedings Vol. 1418:
Laser Diode Technology and Applications III
Daniel S. Renner, Editor(s)

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