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Proceedings Paper

Low-cost nanostructure patterning using step and flash imprint lithography
Author(s): S. V. Sreenivasan; C. Grant Willson; Norman E. Schumaker; Douglas J. Resnick
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Paper Details

Date Published: 24 July 2002
PDF: 8 pages
Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.437804
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Published in SPIE Proceedings Vol. 4608:
Nanostructure Science, Metrology, and Technology

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