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Proceedings Paper

Chemical modification of surfaces utilizing noncovalent interactions
Author(s): Mu-San Chen; Walter J. Dressick; Terence L. Schull; Susan L. Brandow
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Paper Abstract

A critical requirement for using thin polymer films in many microelectronics applications is the ability to selectively immobilize materials on patterned polymer templates.1 Adaptation of standard covalent solution phase chemistries is the most direct approach, but suffers several drawbacks, including the following: (1) reduced reaction rates or yields due to surface steric effects, (2) distortion or dissolution of surface templates due to reagent/polymer incompatibilities, and (3) environmental and cost concerns arising from the use of nonaqueous solvents.

Paper Details

Date Published: 24 July 2002
PDF: 5 pages
Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.437739
Show Author Affiliations
Mu-San Chen
Walter J. Dressick
Terence L. Schull
Susan L. Brandow


Published in SPIE Proceedings Vol. 4608:
Nanostructure Science, Metrology, and Technology
Martin C. Peckerar; Michael T. Postek, Editor(s)

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