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Proceedings Paper

The critical role of metrology in nanotechnology
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Paper Details

Date Published: 24 July 2002
PDF: 9 pages
Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.437273
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Published in SPIE Proceedings Vol. 4608:
Nanostructure Science, Metrology, and Technology

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