Share Email Print

Proceedings Paper

Fabrication of photonic crystals in multilayer organic films
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

We present a novel method for making 2D photonic crystal structures. The method relies on exposing a multilayer electron beam resist. The different layers exhibit different dissolution rates in the developer, which makes it possible to produce a perforated membrane released from the substrate if the resist closest to the substrate has a higher dissolution rate than the resist on the surface. The entire structure is created in a single development step. Various structures fabricated with this method are reported.

Paper Details

Date Published: 24 July 2002
PDF: 5 pages
Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.437272

Published in SPIE Proceedings Vol. 4608:
Nanostructure Science, Metrology, and Technology
Martin C. Peckerar; Michael T. Postek, Editor(s)

© SPIE. Terms of Use
Back to Top