Share Email Print

Proceedings Paper

Ultrashallow p+ junctions in silicon formed by molecular-beam epitaxy using boron delta doping
Author(s): Philip E. Thompson; Joe Bennett
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published: 24 July 2002
PDF: 9 pages
Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.437270
Show Author Affiliations
Philip E. Thompson
Joe Bennett

Published in SPIE Proceedings Vol. 4608:
Nanostructure Science, Metrology, and Technology

© SPIE. Terms of Use
Back to Top