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Proceedings Paper

New methods for fabricating step and flash imprint lithography templates
Author(s): Douglas J. Resnick; Todd C. Bailey; David P. Mancini; Kevin J. Nordquist; William J. Dauksher; Eric S. Ainley; A. Talin; Kathleen A. Gehoski; Jeff H. Baker; Byung Jin Choi; Stephen C. Johnson; Matthew Colburn; Mario J. Meissl; S. V. Sreenivasan; John G. Ekerdt; C. Grant Willson
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Paper Details

Date Published: 24 July 2002
PDF: 6 pages
Proc. SPIE 4608, Nanostructure Science, Metrology, and Technology, (24 July 2002); doi: 10.1117/12.437269

Published in SPIE Proceedings Vol. 4608:
Nanostructure Science, Metrology, and Technology

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