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Proceedings Paper

Use of cross-polarization measurements in the detection of grating asymmetries
Author(s): Ricardo A. Depine
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Paper Abstract

The difference in the curves of the zeroth order cross- polarization reflection coefficients vs. angle of incidence have remarkable potential for application in scatterometry since, if larger than the measurement error, could allow for a reliable nondestructive technique to detect asymmetries in grating profiles. In this paper the cross-polarization efficiencies of metallic gratings with asymmetric grooves are investigated theoretically by means of a rigorous electromagnetic code. The result show that the differences between p yields s and s yields p conversion efficiencies tend to be undetectable for highly conducting materials, limiting, in principle, the application of this potential detection technique.

Paper Details

Date Published: 14 August 2001
PDF: 3 pages
Proc. SPIE 4419, 4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications, (14 August 2001); doi: 10.1117/12.437154
Show Author Affiliations
Ricardo A. Depine, Univ. de Buenos Aires (Argentina)


Published in SPIE Proceedings Vol. 4419:
4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications

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