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Proceedings Paper

Characterization of diffraction gratings using a tabletop soft x-ray laser
Author(s): M. Seminario; Jorge J. G. Rocca; Ricardo A. Depine; Bernhard W. Bach
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Paper Abstract

We demonstrate the use of a 46.9 nm tabletop laser in characterizing diffraction gratings designed for grazing incidence operation in the soft x-ray spectral region. The efficiencies for different diffraction orders were measured as a function of angle of incidence and compared with the results obtained using rigorous electromagnetic model simulations.

Paper Details

Date Published: 14 August 2001
PDF: 4 pages
Proc. SPIE 4419, 4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications, (14 August 2001); doi: 10.1117/12.437151
Show Author Affiliations
M. Seminario, Colorado State Univ. (United States)
Jorge J. G. Rocca, Colorado State Univ. (United States)
Ricardo A. Depine, Univ. de Buenos Aires (Argentina)
Bernhard W. Bach, Hyperfine, Inc. (United States)


Published in SPIE Proceedings Vol. 4419:
4th Iberoamerican Meeting on Optics and 7th Latin American Meeting on Optics, Lasers, and Their Applications

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