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Proceedings Paper

Measurement precision of optical scatterometry
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Paper Abstract

In the work reported here, we discuss the measurement precision of two scatterometry techniques, the variable angle and the variable wavelength techniques. The issue of interest is the measurement precision of the sample parameters. This is determined by both the sensitivity of the diffraction measurable to changes in sample parameters and the precision with which the measurable can be determined. This approach includes taking into account the correlation effect between the contribution to the measurable of the various grating parameters to be determined, such as linewidth and height. The comparison of the theoretical predictions of precision for angle-resolved and wavelength-resolved scatterometer measurements shows no conclusive hierarchy. Practical considerations, however, indicate that angular-resolved scatterometry is a more advantageous technique. For both methods, decreasing the wavelength of the light source improves the determination precision of the sample parameters.

Paper Details

Date Published: 22 August 2001
PDF: 7 pages
Proc. SPIE 4344, Metrology, Inspection, and Process Control for Microlithography XV, (22 August 2001); doi: 10.1117/12.436770
Show Author Affiliations
Petre-Catalin Logofatu, CHTM/Univ. of New Mexico (United States)
John Robert McNeil, CHTM/Univ. of New Mexico (United States)


Published in SPIE Proceedings Vol. 4344:
Metrology, Inspection, and Process Control for Microlithography XV
Neal T. Sullivan, Editor(s)

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